================================================================================

                                  UNITED STATES
                       SECURITIES AND EXCHANGE COMMISSION
                             Washington, D.C. 20549

                                    FORM 11-K


|X|    Annual Report Pursuant to Section 15(d) of the Securities Exchange Act
       of 1934.
       For the fiscal year ended December 31, 2008; or

|_|    Transition Report Pursuant to 15(d) of the Securities Exchange Act
       of 1934.
       For the transition period from ______________ to ______________


                         Commission file number: 0-12742


               Full title of the plan and the address of the plan,
                if different from that of the issuer named below:

                  Spire Corporation 401(k) Profit Sharing Plan
                  --------------------------------------------

         Name of issuer of the securities held pursuant to the plan and
                 the address of its principal executive office:

                                Spire Corporation
                                -----------------

                                One Patriots Park
                        Bedford, Massachusetts 01730-2396
                        ---------------------------------


================================================================================



                                SPIRE CORPORATION
                           401(k) PROFIT SHARING PLAN

                                Table of Contents

                                                                     Page Number


Report of Independent Registered Public Accounting Firm                    1

Financial Statements:

   Statements of Net Assets Available for Benefits                         2

   Statement of Changes in Net Assets Available for Benefits               3

   Notes to Financial Statements                                           4

Supplemental Schedule:

   Schedule H, Line 4i - Form 5500,
      Schedule of Assets (Held at End of Year)                             14

Signatures                                                                 15

Exhibits:

   Consent of Independent Registered Public Accounting Firm
   (filed herewith)




             REPORT OF INDEPENDENT REGISTERED PUBLIC ACCOUNTING FIRM


To the Plan Administrator and Participants of
Spire Corporation 401(k) Profit Sharing Plan
Bedford, Massachusetts

We have audited the accompanying statements of net assets available for benefits
of Spire Corporation 401(k) Profit Sharing Plan (the Plan) as of December 31,
2008 and 2007, and the related statement of changes in net assets available for
benefits for the year ended December 31, 2008. These financial statements and
schedules are the responsibility of the Plan's management. Our responsibility is
to express an opinion on these financial statements based on our audits.

We conducted our audits in accordance with the standards of the Public Company
Accounting Oversight Board (United States). Those standards require that we plan
and perform the audit to obtain reasonable assurance about whether the financial
statements are free of material misstatement. An audit includes examining, on a
test basis, evidence supporting the amounts and disclosures in the financial
statements. An audit also includes assessing the accounting principles used and
significant estimates made by management, as well as evaluating the overall
financial statement presentation. We believe that our audits provide a
reasonable basis for our opinion.

In our opinion, the financial statements referred to above present fairly, in
all material respects, the net assets available for benefits of the Plan as of
December 31, 2008 and 2007 and the changes in net assets available for benefits
for the year ended December 31, 2008 in conformity with accounting principles
generally accepted in the United States of America.

Our audits were performed for the purpose of forming an opinion on the basic
financial statements taken as a whole. The supplemental schedule of assets (held
at end of year) as of December 31, 2008 is presented for the purpose of
additional analysis and is not a required part of the basic financial statements
but is supplementary information required by the Department of Labor's Rules and
Regulations for Reporting under the Employee Retirement Income Security Act of
1974. The supplemental schedule is the responsibility of the Plan's management.
The supplemental schedule has been subjected to the auditing procedures applied
in the audits of the basic financial statements and, in our opinion, is fairly
stated in all material respects in relation to the basic financial statements
taken as a whole.

/s/ Siegrist and Cree, CPA's, PC

SIEGRIST AND CREE, P.C.

Wellesley Hills, Massachusetts
June 23, 2009

                                       1


                  SPIRE CORPORATION 401(k) PROFIT SHARING PLAN
                 Statements of Net Assets Available for Benefits
                           December 31, 2008 and 2007



                                                               2008             2007
                                                           ------------     ------------
                                                                      
Assets
------

Investments:
     At fair value:
     Common stock - Spire Corporation                      $    923,532     $  3,284,103
     Mutual funds                                             4,022,348        5,341,544
     Participant loans                                          175,176          133,171
     Hartford Fixed Income Fund                                 182,660          179,031
                                                           ------------     ------------
         Total investments                                    5,303,716        8,937,849

Money market receivable                                            --              4,732

Contribution receivable:
     Participants                                                 7,432           15,294
     Employeer                                                    2,640             --
                                                           ------------     ------------
                                                                 10,072           15,294

Total assets                                                  5,313,788        8,957,875

Liabilities
-----------

     Excess contributions payable                                33,365           29,149
                                                           ------------     ------------

Net assets reflecting all investments at fair value           5,280,423        8,928,726

Adjustment from fair value to contract value for fully
     benefit responsive investment contracts                      9,957            7,976
                                                           ------------     ------------

Net assets available for benefits                          $  5,290,380     $  8,936,702
                                                           ============     ============


                       See notes to financial statements.

                                       2


                  SPIRE CORPORATION 401(k) PROFIT SHARING PLAN
            Statement of Changes in Net Assets Available for Benefits
                      For the Year Ended December 31, 2008


Additions to net assets:
     Investment income:
         Interest and dividends                                    $    171,076
         Interest on loans                                               13,148
         Net decline in fair value of investments                    (4,220,586)
                                                                   ------------
                                                                     (4,036,362)

     Participant contributions                                          567,389
     Employer contributions                                              47,531
                                                                   ------------

Total additions                                                      (3,421,442)
                                                                   ------------
Deductions from net assets:
     Benefits paid to participants                                      216,683
     Administrative fees                                                  8,197
                                                                   ------------

Total deductions                                                        224,880
                                                                   ------------

Net decrease                                                         (3,646,322)

Net assets available for benefits:

     Beginning of year                                                8,936,702
                                                                   ------------

     End of year                                                   $  5,290,380
                                                                   ============


                       See notes to financial statements.

                                       3


                  SPIRE CORPORATION 401(k) PROFIT SHARING PLAN
                          Notes to Financial Statements
                      For the Year Ended December 31, 2008

1.   Plan Description

     The following brief description of the Spire Corporation 401(k) Profit
     Sharing Plan (the Plan) provides general information only. Participants
     should refer to the Plan agreement for a more complete description of the
     Plan's provisions.

     General
     -------

     The Plan is a defined contribution plan covering all eligible employees of
     Spire Corporation (the "Company"). The Plan was established January 1, 1985
     and was most recently amended on December 29, 2004. Wachovia Retirement
     Services serves as the trustee (the "Trustee") of the Plan's assets. The
     Plan is subject to the provisions of the Internal Revenue Code of 1986, as
     amended, and the provisions of the Employee Retirement Income Security Act
     of 1974 (ERISA).

     Eligibility, Vesting and Contributions
     --------------------------------------

         Eligibility and Contributions
         -----------------------------
         Employees of the Company become eligible to participate in the Plan
         with voluntary contributions to their 401(k) salary deferral account
         upon reaching the age of 21 and upon completion of ninety (90) days of
         service with the Company. The entry dates are the first of the month
         following eligibility. Participants are immediately vested in their
         voluntary contributions plus actual earnings. A participant may
         contribute up to the maximum amount of pre-tax annual compensation
         allowed by the Internal Revenue Code. Participants may contribute
         amounts from distributions from other qualified plans. Participants
         direct the investment of their contributions into various investment
         funds offered by the Plan. Currently, the Plan offers to participant's
         investments in the Company's common stock, mutual funds and an
         insurance contract.

                                       4


         Matching Contribution and Profit Sharing Contribution Plan Component
         --------------------------------------------------------------------
         The Company may contribute a discretionary matching contribution on the
         first 15% of compensation that a participant contributes to the Plan.
         The Company's matching contribution is invested directly in the
         Company's common stock. In 2008, the Company made a matching
         contribution for a portion of the year amounting to $47,531. In
         addition, the Company may make a profit sharing contribution. In 2008,
         the Company did not make any profit sharing contribution.

         Vesting
         -------
         Participants are vested immediately in their voluntary contributions to
         the Plan plus actual earnings thereon. Vesting in the Company matching
         contribution is based on continuous years of service and a participant
         is 100 percent vested after six years of credited service.

         Participant Accounts
         --------------------
         Each participant's account is credited with the participant's
         contributions and allocations of any Company matching contribution and
         the Plan earnings. The benefit to which a participant is entitled is
         the benefit that can be provided from the participant's vested account.
         The participant directs the investment of his or her individual account
         by selecting among funds in a common/collective trust, an insurance
         contract or Company common stock. Each participant has the ability to
         change the investment percentage at any time.

         Forfeited Accounts
         ------------------
         Termination of a participant before being fully vested results in
         forfeiture of the non-vested portion of the participant's account
         balance. Forfeitures may be used to reduce future employer
         contributions. The forfeited amounts available at December 31, 2008 and
         2007 amounted to $33,523 and $32,714, respectively.

         Participant Loans
         -----------------
         Participants may borrow from their fund accounts a minimum of $1,000 up
         to a maximum equal to the lesser of $50,000 or fifty percent of their
         vested account balance. The loan terms range from 1 to 5 years or up to
         10 years for the purchase of a primary residence. The loans are secured
         by the balance in the participant's account and bear interest rate
         commensurate with local prevailing rates as determined by the plan
         administrator. The participant may have five outstanding loans at any
         given time. Interest rates are prime plus one percent. Principal and
         interest are repaid ratably through payroll deductions.

                                       5


         Payments of Benefits
         --------------------
         Employees are permitted to withdraw funds from their accounts upon
         attaining the age of 59-1/2, retirement, termination, financial
         hardship, disability or death. The participant or beneficiary may elect
         to receive lump-sum cash payments or installment payments over the
         participant's and beneficiary's assumed life expectance determined at
         the time of distribution. Benefits are recorded when paid.

         Plan Termination
         ----------------
         Although management has not expressed any intent to do so, the Company
         has the right under the Plan to discontinue and terminate the Plan
         subject to the provisions of ERISA. In the event the Plan terminates,
         participants will become 100% vested in their accounts.

         Administrative Costs
         --------------------
         Certain administrative expenses of the Plan are borne by the Company
         for the year ended December 31, 2008 and amounted to $24,000. Loan fees
         are charged against the borrowers' accounts.

2.   Summary of Significant Accounting Policies

     Basis of Accounting
     -------------------
     The financial statements of the Plan are prepared on the accrual basis of
     accounting in conformity with accounting principles generally accepted in
     the United States of America.

     Recent Accounting Pronouncements
     --------------------------------

     Effective January 1, 2008, the Plan adopted Statement of Financial
     Accounting Standards ("SFAS") No. 157, Fair Value Measurements ("FAS 157").
     In February 2008, the Financial Accounting Standards Board ("FASB") issued
     FASB Staff Position No. FAS 157-2, Effective Date of FASB Statement No.
     157, which provides a one year deferral of the effective date of FAS 157
     for non-financial assets and non-financial liabilities, except those that
     are recognized or disclosed in the financial statements at fair value at
     least annually. Therefore, the Plan has adopted the provisions of FAS 157
     with respect to its financial assets and liabilities only. FAS 157 defines
     fair value, establishes a framework for measuring fair value, and expands
     disclosures about fair value measurements. The new standard provides a
     consistent definition of fair value which focuses on an exit price which is
     the price that would be received to sell an asset or paid to transfer a
     liability in an orderly transaction between market participants at the
     measurement date. The standard also prioritizes, within the measurement of
     fair value, the use of market-based information over entity specific
     information and establishes a three-level hierarchy for fair value
     measurements based on the nature of inputs used in the valuation of an
     asset or liability as of the measurement date. The application of FAS 157
     in situations where the market for a financial asset is not active was
     clarified by the issuance of FASB Staff Position No. FAS 157-3, Determining
     the Fair Value of a Financial Asset When the Market for That Asset Is Not
     Active, ("FAS 157-3") in October 2008. FAS 157-3 became effective
     immediately and did not significantly impact the methods by which the
     Plan determines the fair values of its financial assets.

                                        6



     On April 9, 2009, the FASB issued Staff Position No. FAS 157-4 Determining
     Fair Value When the Volume and Level of Activity for the Asset or Liability
     Have Significantly Decreased and Identifying Transactions That Are Not
     Orderly ("FAS 157-4"). FAS 157-4 provides additional guidance for
     estimating fair value when the volume and level of activity for the asset
     or liability have significantly decreased and includes guidance on
     identifying circumstances that indicate a transaction is not orderly. FAS
     157-4 is effective for reporting periods ending after June 15, 2009, and is
     applied prospectively. Early adoption is not permitted for periods ending
     before March 15, 2009. Plan management does not expect the provisions of
     FAS 157-4 to have a material effect on the Plan's financial statements.

     Investments
     -----------
     The Plans investments are valued at fair value. The mutual funds are valued
     based on quoted market prices which represent the net asset value of the
     underlying assets of the account. Investments in the Company's common stock
     are stated at fair value based on the unitized value of the fund on the
     last business day of the year.

     Investments in benefit responsive insurance contracts are stated at fair
     value as determined by the custodian of those Plan assets. The difference
     between the contract value and the fair value of the benefit responsive
     insurance contracts are presented as an adjustment to net assets available
     for benefits.

     Participant loans are valued at their outstanding balances, which
     approximate fair value. Other investment securities are stated at fair
     value based on their quoted market prices on the last day of the year.

     Use of Estimates
     ----------------
     The preparation of financial statements in conformity with generally
     accepted accounting principles generally accepted in the United States of
     America requires management to make estimates and assumptions that affect
     the reported amounts of net assets, liabilities and changes in net assets
     in the financial statements and accompanying notes. Actual results could
     differ from those estimates.

                                        7


     Risks and Uncertainties
     -----------------------
     The Plan provides to participants various investment options consisting
     primarily of mutual funds, Company common stock and an insurance contract.
     Mutual funds invest in securities, such as, stocks, bonds, and fixed rate
     income securities. Investment securities are exposed to risks including
     changing interest rates, market fluctuations and credit risks. Due to the
     level of risk associated with investment securities, it is reasonable to
     assume that changes in the values of the investment securities will occur
     and that such changes could materially affect participants' account
     balances and the amounts reported in the statement of assets available for
     benefits.

     Investment Transactions and Income
     ----------------------------------
     Purchase and sale transactions are recorded on a trade-date basis. Interest
     income is recorded on the accrual basis and dividend income is recorded on
     the ex-dividend date.

     The Plan reports the net appreciation or decline in the fair value of its
     investments consisting of realized gains or losses and unrealized
     appreciation or depreciation on those investments in the statement of
     changes in net assets available for benefits.

3.   Investments

     Investments that represent five percent (5%) or more of the Plan's net
     assets are as follows:

                                                              December 31,
                                                              ------------
                                                          2008           2007
                                                       ----------     ----------
          Mutual funds
               Oppenheimer Quest Opportunity Value     $  643,991     $  831,305
               Franklin Flexible Capital Growth           720,284      1,114,589
               American Funds Europacific Growth          395,254        725,646
               AIM Cash Reserve Shares                    367,515        287,845
               PIMCO Funds                                273,395        154,485
               Eaton Vance Large Cap Value                124,996        451,696

          Common stock
               Spire Corporation                          923,532      3,284,103


     During 2008 the Plan's investments (including investments bought, sold, and
     held during the year) depreciated in value as follows:

          Mutual funds                               $ (1,635,479)
          Common stock                                 (2,585,107)
                                                     ------------
                                                     $ (4,220,586)
                                                     ============

                                        8


4.   Fair Value Measurements

     FAS 157 establishes a Framework for measuring fair value. That framework
     provides a fair value hierarchy that prioritizes the inputs to valuation
     techniques used to measure fair value. The hierarchy gives the highest
     priority to unadjusted quoted prices in active markets for identical assets
     or liabilities (Level 1) and the lowest priority to unobservable inputs
     (Level 3). The three levels of the fair value hierarchy under FAS 157, and
     its applicability to the Plan, are described below:

          Level 1 - Pricing inputs are quoted prices available in active markets
          for identical investments as of the reporting date. As required by FAS
          157, the Plan does not adjust the quoted price for these investments,
          even in situations where the Plan holds a large position and a sale
          could reasonably impact the quoted price.

          Level 2 - Pricing inputs are quoted prices for similar investments, or
          inputs that are observable, either directly or indirectly, for
          substantially the full term through corroboration with observable
          market data. Level 2 includes investments valued at quoted prices
          adjusted for legal or contractual restrictions specific to these
          investments.

          Level 3 - Pricing inputs are unobservable for the investment, that is,
          inputs that reflect the reporting entity's own assumptions about the
          assumptions market participants would use in pricing the asset or
          liability. Level 3 includes investments that are supported by little
          or no market activity.

     The following table presents the financial instruments related to the
     Plan's assets carried at fair value as of December 31, 2008 by FAS 157
     valuation hierarchy (as defined above).


                                                 Level 1      Level 2      Level 3       Total
                                               -----------  -----------  -----------  -----------
                                                                          
          Common stock - Spire Corporation     $       --   $   923,532  $       --   $   923,532
          Mutual funds                           4,022,348          --           --     4,022,348
          Hartford fixed income fund                   --       182,660          --       182,660
          Participant Loans                            --           --       175,176      175,176
                                               -----------  -----------  -----------  -----------
          Total investments at fair value      $ 4,022,348  $ 1,106,192  $   175,176  $ 5,303,716
                                               ===========  ===========  ===========  ===========

     The following table presents a summary of changes in the fair value of the
     Plan's Level 3 assets for the year ended December 31, 2008.

                                        9


     Participant Loans:
     ------------------
       Beginning balance at January 1, 2008                    $ 133,171
       Purchases, sales, issuances and settlements (net)          42,005
                                                               ---------
       Ending balance at December 31, 2008                     $ 175,176
                                                               =========

5.   Nonparticipant-Directed Investments

     Information about the net assets and the significant components of the
     changes in net assets relating to nonparticipant-directed investments is as
     follows:

                                                              December 31,
                                                              ------------
                                                          2008           2007
                                                       ----------     ----------
          Net assets:
             Common stock - Spire Corporation          $  722,115     $3,268,876
             Other                                        434,846        393,040
                                                       ----------     ----------

          Total nonparticipant-directed                $1,156,961     $3,661,916
                                                       ==========     ==========

     Changes in net assets during 2008:
        Employer contributions                                      $    47,531
        Net decline in fair value of investments                     (2,552,486)
                                                                    -----------
                                                                    $(2,504,955)
                                                                    ===========

6.   Investment Contract with Insurance Company

     In 1995, the Plan entered into a benefit-responsive investment contract
     with The Hartford Group (Hartford). Hartford maintains the contributions in
     a general account. The account is credited with earnings on the underlying
     investments and charged for participant withdrawals and administrative
     expenses. The contract is included in the statements of net assets
     available for benefits at fair value as determined using the market
     approach based on market prices of similar contracts. The adjustment from
     fair value to contract value for the investment contract is based on the
     contract value as reported to the Plan by Hartford. Contract value
     represents contributions made under the contract, plus earnings, less
     participant withdrawals and administrative expenses. Participants may
     ordinarily direct the withdrawal or transfer of all or a portion of their
     investment at contract value.

                                       10


     The fair value of the investment contract at December 31, 2008 and 2007 was
     $182,660 and $179,031, respectively. The average yield was 3% for both 2008
     and 2007. The interest crediting rate was 3% and 3.36% for 2008 and 2007,
     respectively.

     Certain events, such as the premature termination of the contract by the
     Plan or the termination of the Plan, would limit the Plan's ability to
     transact at contract value with Hartford. The Plan administrator believes
     the occurrence of such events that would also limit the Plan's ability to
     transact at contract value with Plan participants is not probable.

7.   Income Tax Status

     The Internal Revenue Service has determined and informed the Company by a
     letter dated May 23, 1995, that the Plan and related trust are designed in
     accordance with applicable sections of the Internal Revenue Code (IRC).
     Although the Plan has been amended since receiving the determination
     letter, the plan administrator believes that the Plan is designed and is
     currently being operated in compliance with the applicable requirements of
     the Internal Revenue Code. Therefore, no provision for income taxes has
     been included in the Plan's financial statements.

8.   Excess Contributions

     Benefit distributions for the plan year ended December 31, 2008 and 2007
     include payments of $33,365 and $29,149, respectively, made to certain
     active participants to return to them excess deferral contributions as
     required to satisfy the relevant nondiscrimination provisions of the Plan
     for the prior year.

     Contributions received for the year ended December 31, 2008 are net of
     payments of $33,365 made on March 15, 2009 to certain active participants
     to return to them excess deferral contributions as required to satisfy the
     relevant nondiscrimination provisions of the Plan. That amount is also
     included in the plan's statement of net assets available for benefits as
     excess contributions payable at December 31, 2008.

9.   Loans to Participants

     The Plan permits participants to obtain loans against their account
     balance. The loans are administered by the trustee and are recorded at
     their estimated fair value as reported by the administrator. As of December
     31, 2008 and 2007, total loans outstanding were $175,176 and $133,171
     respectively. Interest earned on such loans for the year ended December 31,
     2008 amounted to $13,148.

                                       11


10.   Related Party Transactions

     Wachovia Retirement Services is the custodian of the Plan's assets and
     record keeper. Certain participant investments are in mutual funds managed
     by Wachovia Retirement Services and these transactions are considered as
     party-in-interest.

     The Plan sponsor has paid the third party administrator fees and audit fees
     for 2008 aggregating $24,000.

     Participant loans granted in accordance with the Plan are considered as
     party-in-interest transactions.

11. Reconciliation of Financial Statements to Form 5500

     The following is reconciliation per the financial statements at December
     31, 2008 to the 2008 Form 5500 - Annual Return/Report of Employee Benefit
     Plan:


                                                                                 2008              2007
                                                                             ------------      ------------
                                                                                         
          Net assets available for benefits per the financial statements     $  5,290,380      $  8,936,702
          Less: Contributions receivable
                   Participants                                                    (7,432)          (15,294)
                   Employer match                                                  (2,640)             --
                                                                             ------------      ------------
                                                                                  (10,072)          (15,294)

          Add: Excess contributions payable                                        33,365            29,149
                                                                             ------------      ------------
          Net assets available for benefits per the 2008 Form 5500           $  5,313,673      $  8,950,557
                                                                             ============      ============

          Participant contributions per the financial statements             $    567,389
          Less: Current year excess contributions payable                          (7,432)

          Add: Current year excess contributions payable                           33,365
               Prior year contribution receivable                                  15,294
               Loan payment incorrectly posted as contribution                         94
                                                                             ------------
          Participant contributions per Form 5500 - 2008                     $    608,710
                                                                             ============

Employer matching contributions per financial statements                     $     47,531
Less: Current year contribution receivable                                         (2,640)
                                                                             ------------
Employer matching contributions per Form 5500 - 2008                         $     44,891
                                                                             ============


                                       12


12. Adjustment to Prior Year

     The Plan financial statements for 2007 did not include the participant's
     contribution receivable. The following table restates 2007 for that item:

                                                                2007
                                                            ------------
          Net assets available for benefit as reported      $  8,921,408
          Add: Participants contribution receivable               15,294
                                                            ------------
          Net assets available for benefits as restated     $  8,936,702
                                                            ============


















                                       13


                                SPIRE CORPORATION
                           401(k) PROFIT SHARING PLAN

                         Schedule H, Line 4i - Form 5500
                    Schedule of Assets (Held at End of Year)
                                December 31, 2008

E.I.N. 04-2457335
Plan Number 002


(a)       (b)                                      (c)                                     (d)             (e)
                                          Description of Investment
    Identity of Issue,                    Including Maturity Date,
    Borrower, Lessor or                   Rate of Interest, Collateral,                                   Current
    Similar Party                         Par or Maturity Value                            Cost            Value
-----------------------------------------------------------------------------------------------------------------------
                                                                                               
*   Spire Corporation                     168,538 shares of common stock                $1,518,737      $   923,532
    Franklin Templeton Investments        Franklin Flexible Capital Growth                     n/a          720,284
    OppenheimerFunds                      Oppenheimer Quest Opportunity Value                  n/a          643,991
    American Funds                        Europacific Growth                                   n/a          395,254
    AIM Funds                             AIM Cash Reserve Shares                              n/a          367,515
    Evergreen Investments                 Evergreen Money Market                               n/a          325,257
    PIMCO Funds                           Total Return                                         n/a          273,395
    Eaton Vance                           Large Cap Value                                      n/a          205,702
    Hartford Life Insurance Co.           Fixed Income                                         n/a          192,617
    Allianz NJF                           Dividend Value R                                     n/a          144,876
    OppenheimerFunds                      Oppenheimer Strategic Income                         n/a          142,757
    Eaton Vance                           Income Fund of Boston                                n/a          124,996
    American Funds                        New Perspective                                      n/a          110,352
    American Funds                        American Balanced                                    n/a           98,719
    Sentinel Group Funds                  Sentinel Small Company                               n/a           97,580
    Goldman Sachs                         MidCap Value A                                       n/a           95,454
    Allianz Funds                         RCM Global Technology                                n/a           87,833
    Davis Funds                           Davis New York Venture                               n/a           64,303
    Franklin Templeton Investments        Franklin Small-Mid Cap Growth                        n/a           53,065
    Pioneer Investments                   Pioneer Cash Reserves                                n/a           33,523
    MFS Investment Management             Mass Investors Growth Stock                          n/a           16,059
    Third Avenue                          Third Avenue Small Cap Value A                       n/a           10,825
    Cash                                                                                                     10,608
*   Participant Loans                     Interest rates 5% to 9.5%                            n/a          175,176
                                                                                                         ----------
                                                                                                         $5,313,673
                                                                                                         ==========
*  Represents party-in-interest


   The independent registered public accounting firm's report should be read
with this supplementary schedule.

                                       14


SIGNATURE


     Pursuant to the requirements of the Securities Exchange Act of 1934, the
Investment Committee of the Spire Corporation 401(k) Profit Sharing Plan have
duly caused this annual report to be signed on their behalf by the undersigned
hereunto duly authorized.


                                       SPIRE CORPORATION 401(k) PROFIT SHARING
                                       PLAN

Date:  June 30, 2009                   By: /s/ Christian Dufresne
                                           -----------------------------------
                                           Christian Dufresne
                                           Chief Financial Officer and Treasurer




















                                       15